Imiti ya mashini-mashini (CMP) ikunze kugira uruhare mukubyara ubuso bworoshye hakoreshejwe imiti, cyane cyane mubikorwa byinganda zikora semiconductor.Lonnmeter, udushya twizewe ufite imyaka irenga 20 yinzobere mugupima umurongo wa concentration, atanga reta-yubuhangametero zidafite ingufu za kirimbuzina sensor ya viscosity kugirango ikemure ibibazo byubuyobozi bwihuse.
Akamaro k'ubuziranenge bwa Slurry n'ubuhanga bwa Lonnmeter
Imiti ya mashini ikora neza ni inkingi yimikorere ya CMP, igena uburinganire nubwiza bwimiterere. Ubucucike budahuye cyangwa ubwiza bushobora gutera inenge nka micro-scratches, kuvanaho ibintu bitaringaniye, cyangwa gufunga padi, kubangamira ubuziranenge bwa wafer no kongera ibiciro byumusaruro. Lonnmeter, umuyobozi wisi yose mubisubizo byo gupima inganda, azobereye mugupima inline kugirango yizere neza imikorere myiza. Hamwe nibimenyetso byagaragaye byerekana gutanga ibyuma byizewe, bihanitse cyane, Lonnmeter yafatanije nabayobozi bayobora igice cya kabiri cyogukora kugirango bongere igenzura nibikorwa neza. Ibipimo byabo bidafite ingufu za kirimbuzi hamwe na sensor ya viscosity bitanga amakuru nyayo, bigafasha guhinduka neza kugirango bikomeze guhuzagurika kandi byujuje ibyifuzo bikenerwa ninganda zigezweho.
Kurenza imyaka mirongo ibiri yuburambe mugupima umurongo wo gupima, wizewe na firime ya semiconductor yo hejuru. Rukuruzi ya Lonnmeter yagenewe kwishyira hamwe no kubungabunga zeru, kugabanya ibiciro byakazi.
Uruhare rwa Shimi ya mashini mu gutunganya Semiconductor
Imashini ikora imashini (CMP), nanone yitwa planarisation ya chimique-mashini, ni ibuye rikomeza imfuruka yo gukora semiconductor, ituma hashyirwaho ubuso butagira inenge, butagira inenge kugirango butange umusaruro ushimishije. Muguhuza imiti yimiti hamwe no gukanika imashini, inzira ya CMP itanga ibisobanuro bisabwa kugirango imirongo myinshi ihuriweho hamwe kuri node iri munsi ya 10nm. Ibikoresho bya chimique yamashanyarazi, bigizwe namazi, reagent ya chimique, nuduce duto twa abrasive, ikorana na pisine na wafer kugirango ikure ibintu kimwe. Mugihe igishushanyo mbonera cya semiconductor kigenda gihinduka, inzira ya CMP ihura ningorabahizi, bisaba kugenzura neza imitungo idahwitse kugirango ikumire inenge kandi igere kuri waferi yoroshye, isukuye isabwa na Semiconductor Foundries hamwe nabatanga ibikoresho.
Inzira ningirakamaro mukubyara 5nm na 3nm chip ifite inenge nkeya, itanga ubuso buringaniye kugirango ishyirwe neza mubyiciro byakurikiyeho. Ndetse no guhuzagurika kworoheje bishobora kuganisha ku gukora cyane cyangwa gutakaza umusaruro.
Inzitizi mugukurikirana ibyiza bya Slurry
Kugumana ubucucike buhoraho hamwe nubukonje mubikorwa bya chimique yamashanyarazi byuzuyemo ibibazo. Imiterere ya slurry irashobora gutandukana bitewe nibintu nko gutwara, kuvomera amazi cyangwa hydrogen peroxide, kuvanga bidahagije, cyangwa kwangirika kwimiti. Kurugero, ibice bituje muburyo bworoshye birashobora gutera ubucucike buri hejuru, biganisha kumurongo umwe. Uburyo bwa gakondo bwo gukurikirana nka pH, okiside-kugabanya ubushobozi (ORP), cyangwa ubwikorezi akenshi ntibihagije, kuko binaniwe kumenya impinduka zifatika mubihimbano. Izi mbogamizi zirashobora kuvamo inenge, kugabanya igipimo cyo gukuraho, no kongera ibiciro bikoreshwa, bigatera ingaruka zikomeye kubakora ibikoresho bya semiconductor hamwe nabatanga serivisi za CMP. Guhindura ibihimbano mugihe cyo gutunganya no gutanga bigira ingaruka kumikorere. Sub-10nm node isaba kugenzura neza ubuziranenge bwihuse no kuvanga neza. pH na ORP byerekana itandukaniro rito, mugihe imiyoboro iratandukanye no gusaza buhoro. Imiterere idahwitse irashobora kongera igipimo cy inenge kugera kuri 20%, kubushakashatsi bwinganda.
Lonnmeter Inline Sensors yo Gukurikirana-Igihe
Lonnmeter ikemura ibyo bibazo hamwe na metero zayo zidafite ingufu za kirimbuzi kandiibyuma bifata ibyuma, harimo metero ya viscosity inline kumurongo wo gupima viscosity hamwe na metero yubucucike bwa ultrasonic kugirango icyarimwe ubucucike bwikurikiranya hamwe no kugenzura ibicucu. Izi sensororo zagenewe kwishyira hamwe muburyo bwa CMP, zerekana inganda-zisanzwe. Ibisubizo bya Lonnmeter bitanga igihe kirekire kandi cyizewe kubwubatsi bukomeye. Amakuru nyayo ashoboza abashoramari guhuza neza ibivanze, gukumira inenge, no kunoza imikorere ya polishinge, bigatuma ibyo bikoresho ari ntangarugero kubisesengura no gupima ibikoresho hamwe nabatanga ibikoresho bya CMP.
Inyungu zo Gukomeza Gukurikirana Kuri CMP Optimisation
Gukomeza gukurikirana hamwe na sensor ya Lonnmeter ihindura uburyo bwo gutunganya imashini itanga ubushishozi no kuzigama amafaranga. Ibipimo nyabyo byo gupima no kugenzura ubukonje bigabanya inenge nko gushushanya cyangwa kurenza urugero kugeza kuri 20%, ukurikije ibipimo ngenderwaho. Kwishyira hamwe hamwe na sisitemu ya PLC ituma ikoreshwa ryikora kandi ikagenzura uburyo, igenzura imitungo idahwitse iguma murwego rwiza. Ibi biganisha ku kugabanuka kwa 15-25% kugiciro cyakoreshejwe, kugabanya igihe cyo hasi, no kunoza uburinganire bwa wafer. Kuri Semiconductor Fondasiyo na CMP itanga serivisi, izi nyungu zisobanura kongera umusaruro, inyungu nyinshi, no kubahiriza ibipimo nka ISO 6976.
Ibibazo Rusange Kubijyanye no Gukurikirana Slurry muri CMP
Kuki gupima ubucucike ari ngombwa kuri CMP?
Ibipimo by'ubucucike bwihuse byerekana gukwirakwiza ibice no guhuza ibintu, gukumira inenge no kugabanya igipimo cyo kuvanaho uburyo bwo gutunganya imashini. Ifasha umusaruro mwiza wafer no kubahiriza amahame yinganda.
Nigute gukurikirana viscosity byongera imikorere ya CMP?
Igenzura rya Viscosity rikomeza gutembera neza, birinda ibibazo nko gufunga padi cyangwa gusiga neza. Lonnmeter inline sensor itanga amakuru nyayo yo kunoza imikorere ya CMP no kuzamura umusaruro wafer.
Niki gituma Lonnmeter idafite ingufu za metero zidasanzwe?
Ubunini bwa Lonnmeter butagira ingufu za kirimbuzi butanga icyarimwe icyarimwe hamwe no gupima ubukonje hamwe nukuri neza no kubungabunga zeru. Igishushanyo cyabo gikomeye cyizewe mugusaba ibidukikije bya CMP.
Igipimo nyacyo cyo gupima ubucucike no kugenzura ubukonje nibyingenzi mugutezimbere uburyo bwa chimique yamashanyarazi mugukora semiconductor. Uburebure bwa Lonnmeter butagira ingufu za kirimbuzi hamwe na sensor ya viscosity bitanga ibikoresho bya Semiconductor ibikoresho, Abaguzi ba CMP, hamwe na Semiconductor Foundries hamwe nibikoresho byo gukemura ibibazo byubuyobozi bwihuse, kugabanya inenge, nigiciro gito. Mugutanga amakuru yukuri, nyayo-nyayo, ibisubizo byongera imikorere neza, byemeza kubahiriza, kandi bigatanga inyungu kumasoko ya CMP irushanwa. SuraUrubuga rwa Lonnmetercyangwa hamagara itsinda ryabo uyumunsi kugirango umenye uburyo Lonnmeter ishobora guhindura imikorere yimiti ya mashini.
Igihe cyo kohereza: Jul-22-2025
